Products

• Semiconductor Device Manufacturing Equipment
• Storage Device Manufacturing Equipment
• Equipment for Electronic Device Manufacturing and for R&D
• Panel Device Manufacturing Equipment
• Vacuum Components
  • Vacuum Pumps
    • Ion Pump/Noble Pump
    • Excel Pump
    • Titanium Sublimation Pump/Tie-back Pump
    • Combination Pump
    • POWER Series Cryo Pump High performance cryo pump having 8 to 12 inch intake diameter (compact)
    • POWER Eco Series Cryo Pump High performance energy-saving cryo pump with 8 to 22 inch intake diameter
    • Cryogenic Trap for Roughing Pump Line Inline Trap V-080LT /V-081LT 81LT
    • Air Cooled Freezer Module V-080R/V-081R
    • Air Cooled Freezer Module V-150R
    • Foreline Trap Foreline Trap 2F Foreline trap S
    • Screw Type SDE Series for Hard Process Screw Type Dry Pump SDE 90/120 Dry Pumping Unit SDE303A/603A/1203B/2003B
    • Roots Type MU Series for Light Process Roots Type Dry Pump MU100N/300
  • Quadrupole Mass Spectrometers
  • Vacuum Gauges
  • Leak Detectors
  • Piping Parts·Ancillary Materials
  • Valves
  • Feed Throughs
  • E-type Electron Gun