Cold Cathode Pirani Gauge M-361CP

New Product  Cold Cathode Pirani Gauge M-361CP

M-361CP is a combination gauge combining pirani gauge measuring atmospheric pressure to medium vacuum and cold cathode gauge measuring high vacuum to ultra-high vacuum.
Wide range measurement is realized by just one gauge.
2in1;Contributing to system cost reduction.

Cold Cathode Pirani Gauge M-361CP

RoHS

CE

Features

  1. Excellent measurement stability
    Reducing switching fault of pirani and cold cathode, measurement stop due to undischarge and fluctuation of pressure indication value.
  2. Excellent atmospheric pressure detection
    Good measurement around the atmospheric pressure area by pirani gauge.
    Responsiveness is equal to diaphragm gage.
  3. Simple maintenance
    Only maintenance kit exchange for a part of the cold cathode gauge.

Applications

Widely applicable for vacuum measurements from atmospheric pressure to ultra-high vacuum

Electronics and Optics: vacuum evaporation, coating, electron beam musk writing, sputtering, ion implantation, MBE
Analysis: SEM, SIMS, AES, XPS, and other analysis methodes using any vacuum processes
Industrial: aneal, dissolution, soldering, reflow, curing, electron beam welding, metallurgy, molecular distillation, gas filling
High Energy Physics: accelerator, cyclotron

Specifications

Type Cold Cathode Pirani Gauge
M-361CP-SP
Type with Set Point
M-361CP-RS
RS485 Type
Pressure measurement range 1×10-7 to 1×105(Pa)
Input voltage +15 to 30VDC
Power consumption 2.4W
Analog output 0 to 10V -
Set point 2 contact output (DC30V, 1A)
Interface - RS485
I/O connector D-sub 9 pin (available with conversion connector)
Maximum cable length 300m (1mm2)*1
Operating temperature range 5 to 55℃
Storage temperature range -20 to 70℃ (not operating)
Sensor Type CP2
Sensor material (main component) Filament: W, Electrode: Mo, Insulator: Al2O2, Case: SUS304
Dimensions (mm) 50(W)×50(D)×110(L) (NW25)
Flange shape NW25, NW40, φ70ICF
Protection standard RoHS, CE, IP40

*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

Dimensions

Cold Cathode Pirani Gauge M-361CP Dimensions

Parts Number

Parts Number Model Description Remarks Code
0160-12463M M-361CP-SP/N25 Cold Cathode Pirani Gauge w NW25 Flange 22800
0160-12471M M-361CP-SP/N40 Cold Cathode Pirani Gauge w NW40 Flange 22801
0160-12489M M-361CP-SP/C70 Cold Cathode Pirani Gauge w φ70ICF Flange 22802
0160-12497M M-361CP-SP/N25 Cold Cathode Pirani Gauge (RS485) w NW25 Flange 22803
0160-12502M M-361CP-SP/N40 Cold Cathode Pirani Gauge (RS485) w NW40 Flange 22804
0160-12510M M-361CP-SP/C70 Cold Cathode Pirani Gauge (RS485) w φ70ICF Flange 22805
0162-24379M - M-361CP/370CG Maintenance kit Pole piece, Mesh 22790
Catalog DownloadPDF:285KB

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