We have developed our service network with the basic understanding that "communicating closely with our customers is essential for the provision of better products and services". Our service representatives at home and abroad provide domestic and overseas customers with quick, complete and flexible maintenance services ideal for the region.
The optimum solution support available to satisfy your needs.
Actual
example of overhaul
Concrete example of modification
1. Cathode
Addition of cathode, change of size
Use of magnetron cathode
2. Substrate and substrate holder
Change in size of substrate
Rotating/revolving substrate holder
High-temperature substrate heating mechanism (800°C)
3. Controllers
DC⇔RF sputtering
Auto-tuning mechanism applying RF
4. Pumping system, gas feeding system
Change of pumping system (cryopump, turbo molecular pump, dry pump, etc.)
Slow pumping, slow venting mechanism
Addition of gas feeding system (manual system, flow meter, AFC, etc.)
Addition of loadlock chamber
5. Others
Auto pressure control mechanism
Mounting of reverse sputtering (bias) mechanism
Other requirements you may have
We offer training on our I-1060 and I-1080 sputtering equipments, I-1040 dry etching equipments, etc. so that you can become familiar with the maintenance method through the learning of theories and actual practical training. We help you to improve the operation rate of the equipments and train maintenance technicians.
Training on equipments