Electron Devices
Panel Devices
Laboratory / small-scale production equipment
Vacuum Components
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We provide products achieved by applying vacuum technology, such as manufacturing equipments for storage devices, semiconductors, liquid crystal display (LCD), and plasma display panels (PDP), small-size manufacturing equipments for laboratory use, and those for medium-scale production.
Storage
(manufacturing equipment for magnetic disks, magnetic heads, sensors, masks, and densely packed substrate)
Sputtering equipment
Dry etching equipment
Semiconductors
(6-inch, 8-inch, and 300-mm semiconductor mass-production equipment)
Sputtering equipment
SRE equipment
LCD
(manufacturing equipment for LCD elements)
Sputtering equipment
Plasma CVD equipment
Sputtering Equipment EC7000
Sputtering Equipment EB1000
Sputtering Equipment EB1100
Vacuum pumps
Vacuum Gauges
Quadrupole Mass Spectrometer
Helium Leak Detector
IA-Lab