Panel Device Manufacturing Equipment
SC7000 Compact PVD Equipment Uni-Fab Series
Typical multi-chamber cluster-type PVD equipment can deposit only one kind of material per film deposition chamber, and accordingly requires as many deposition chambers as the materials needed.
The SC7000 is a compact multifunctional PVD equipment developed to allow as many as three materials to be deposited in a single film deposition chamber.
Applications
Panel device production (supporting 4th to 4.5th generation)
Features
- The cathode concept of this equipment takes advantage of our original technologies similar to C-3530.
- Depending on the production scale and application, the SC7000 series is available as a single type SC7000 with one film deposition chamber and a as dual type SC7000 with two film deposition chambers.
Specifications
- System configuration:
- Cluster type
- Substrate size:
- G4, G4.5 support