Panel Device Manufacturing Equipment
SL3000 Series Horizontal Inline PVD Equipment
This is a horizontal inline PVD equipment suitable for forming various electrodes and precursors mainly for solar battery applications. It adopts a concept pursuing simple configuration which is the result of analyzing market requirements.
Applications
Solar battery production
Features
- Tact time reduction
- Equipped with cathode having high material utilization
- Transport with or without tray selectable according to application requirement
Specifications
- System configuration:
- Horizontal inline type
- Substrate size:
- Negotiable