The compact and smart EC7000 sputtering equipment embodies our substantial vacuum and sputtering techniques. The  equipment in cassette-to-cassette specifications, which allows continuous automatic deposition of multiple substrates with simple switch operation, is ideal for R&D and small-scale productions.

The compact EB1000 sputtering equipment provided with multiple functions satisfies various needs in the field of R&D.

The EB1100 general-purpose sputtering equipment provided with substantial functions as standard satisfies various needs in the field of R&D and production.