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Products
Semiconductor Device Manufacturing Equipment
FC7100 Metal Gate Process PVD Equipment
IC7400 PVD Equipment for Wafer Packaging (φ300mm support)
IC7800 PVD Equipment for MRAM (φ300mm support)
EC8000 Integrated Dry Processing - Protective Film Formation Equipment for MRAM
IC7500 Memory Wire PVD Mass Production Equipment (φ300mm support)
FC7000（φ200mm）/FC7200（φ300mm） Surface Reaction Epitaxy Equipment
Storage Device Manufacturing Equipment
ML3000 Series Disk PVD Equipment
HC7300 Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment
HC7100 Sputtering Equipment for Magnetic Heads
HC7400 Dry Etching Equipment for Magnetic Film
Equipment for Electronic Device Manufacturing and for R&D
EB1000 PVD Equipment for R&D
EC7000 Series PVD Equipment for Small-Scale Production
EC7200 SiC Electron Bombardment Anneal System (EBAS)
EL3200 Inline Type PVD Equipment for Electronic Component Production
EB1100 PVD Equipment for R&D/Small-Scale Production
EC3000 Series PVD Equipment for LED Production
EC7400 PVD Equipment for Electronic Component Production
Panel Device Manufacturing Equipment
SC7000 Compact PVD Equipment Uni-Fab Series
SL3000 Series Horizontal Inline PVD Equipment
DL3x00 Series Multi Generation Support Vertical PVD Equipment
SL3x00 Series Inline PVD Equipment
Vacuum Components
Vacuum Pumps
Vacuum Gauges
Piping Parts·Ancillary Materials
Feed Throughs
Quadrupole Mass Spectrometers
Leak Detectors
Valves
E-type Electron Gun
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Equipment Remodeling Support
Overhaul of Vacuum Equipments
Maintenance Parts Support
Cleaning Support for Regeneration
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