• Creating the future
  with Vacuum
  technology
• Creating the future
  with Vacuum
  technology
  Vacuum is a state of space having sub-atomosheric pressure.
  Ultra-high vacuum that enables nano level micro fabrication is
  naturally available only is outer space at the altitude of 300km
  or above.
  This ultra-high vacuum is where CANON ANELVA's expertise lies.
• CANON ANELVA continues to be a pioneer
  in advanced vacuum and thin film technology.
• CANON ANELVA contributing
  enhancement of 5G
  communication society.
• Products ＞
• Creating the future from
  the foothills of Mt. Fuji
• Creating the future from
  the foothills of Mt. Fuji

• Creating the future
  with Vacuum
  technology
• Creating the future
  with Vacuum
  technology

  Vacuum is a state of space having sub-atomosheric pressure.
  Ultra-high vacuum that enables nano level micro fabrication is
  naturally available only is outer space at the altitude of 300km
  or above.
  This ultra-high vacuum is where CANON ANELVA's expertise lies.
• CANON ANELVA continues to be a pioneer
  in advanced vacuum and thin film technology.
• CANON ANELVA contributing
  enhancement of 5G
  communication society.
• Products ＞
• Creating the future from
  the foothills of Mt. Fuji
• Creating the future from
  the foothills of Mt. Fuji

⯈  Products  ❯

📌  Equipment  ❯

•  Sputtering Equipment  ❯
✔  FC7100 Metal Gate Process PVD Equipment  ❯
✔  IC7500 Interconnect PVD Equipment  ❯
✔  IC7200 Interconnect PVD Equipment  ❯
✔  EC7800 PVD Equipment for Semiconductor  ❯
✔  NC7900 MRAM PVD Equipment  ❯
✔  HC7100 Sputtering Equipment for Magnetic Heads  ❯
✔  HC7300 Sputtering Equipment for Magnetic Heads  ❯
✔  EC7000 Series PVD Equipment for Small-Scale Production  ❯
✔  EC7400 PVD Equipment for Electronic Component Production  ❯
✔  EC8100 LED PVD Equipment  ❯
✔  EL3000 Series PVD Equipment for LED Production  ❯
✔  EL3200 Inline Type PVD Equipment for Electronic Component Production  ❯
✔  EL3400 Advanced Packaging High Productivity PVD Equipment  ❯
✔  ML3000 Series Disk PVD Equipment  ❯
✔  EB1000 PVD Equipment for R&D  ❯
✔  EB1100 PVD Equipment for R&D/Small-Scale Production  ❯

•  Etching Equipment  ❯
✔  EC8000 Dry Etching Equipment  ❯
✔  NC8000 MRAM Etching Equipment  ❯

•  Bonding Equipment  ❯
✔  BC7000 Atomic Diffusion Bonding Equipment  ❯

•  Anneal Equipment  ❯
✔  EC7200 SiC Electron Bombardment Anneal System (EBAS)  ❯

📌  Components  ❯

•  Vacuum Pumps  ❯

•  Quadrupole Mass Spectrometers  ❯

•  Vacuum Gauges  ❯

•  Leak Detectors  ❯

•  Piping Parts·Ancillary Materials  ❯

•  Valves  ❯

•  Feed Throughs  ❯

•  E-type Electron Gun  ❯

•  X-ray Source  ❯

•  Vacuum Components Catalog  ❯

⯈  Maintenance Services  ❯

•  Service Representatives  ❯
•  Maintenance Parts Support  ❯
•  Equipment Remodeling Support  ❯
•  Cleaning Support for Regeneration  ❯
•  Overhaul of Vacuum Equipments  ❯
•  Product safety information  ❯

⯈  Corporate Info  ❯

•  Message from the President  ❯
•  Corporate Profile  ❯
•  History  ❯
•  Board of Directors  ❯
•  Organization  ❯
•  Operations  ❯
•  Commitment to the Environment  ❯
•  Quality Management  ❯

⯈  News  ❯

⯈  Contuct us  ❯