Linear Feedthrough

Linear Feedthrough

This is a linear feedthrough to introduce linear motion into equipment installed in vacuum. It can be used in ultra-high vacuum range up to 10-8Pa.

Linear Feedthrough

Features

  1. All-metal and capable of hard baking, suitable for ultra-high vacuum systems.
  2. This is a bellows type linear feedthrough, with the vacuum side and the air side completely separated by a bellows.
  3. Introduces linear motion into vacuum by using the expansion and contraction of the bellows, preventing the leaks during operation.

Specifications

Type Name Drive system Connection
flange
Linear
movement
Allowable
maximum
thrust
Allowable
heating
temperature
Weight Backlash
954-7621 Linear motion drive Bellows translatory movement φ70ICF 20mm 196N 300℃ 0.6kg ±0.5mm or less
954-7622 Linear motion drive φ70ICF 40mm 196N 300℃ 0.7kg
954-7623 Mini linear motion drive φ34ICF 20mm 147N 300℃ 0.48kg
954-7626 Mini linear motion drive φ34ICF 25mm 147N 200℃ 0.9kg ±0.3mm or less
954-7627 Mini linear motion drive φ34ICF 40mm 147N 200℃ 1.1kg

Other common specifications

  • Leak: 1.3×10-11Pa·m3/sec or less


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