MRAM Etching Equipment NC8000

NC8000  MRAM Etching Equipment

NC8000 is Ion Beam Etching Equipment for Multi stacked MRAM element, which has difficulty in current RIE etching process.

High etching performance and high productivity is realized.

NC8000  MRAM Etching Equipment

Applications

MRAM volume manufacturing

Features

  • Good uniformity and high productivity by large diameter grid
  • Overall etching process by clampless folder with 2 axis of revoluation and stage angle
  • Optical End Point detection system (OES) for MRAM multi stacked structure

Specifications

System configuration:
Cluster type
Substrate size:
φ300mm


© CANON ANELVA CORPORATION

Contact us  |  Terms of use  |  Privacy notice