Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment HC7300

HC7300
Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment

Effectively consolidates magnetic head production processes.
This is an integrated magnetic HEAD production equipment only possible with Canon ANELVA product lineup.

HC7300 Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment

Applications

Magnetic head production

Features

  • Delivers integrated processing from PR-on-TMR state to cap layer formation through milling and various types of deposition.
  • Provides optimum module lineup to enable optimum processing shape required by each element.
    (e.g. IBE, anisotropic sputtering, isotropic sputtering, RIE)
  • Delivers excellent deposition characteristic and high productivity through integrated vacuum process.

Specifications

System configuration:
Cluster type
Substrate size:
φ150mm、φ200mm


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