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Products
Semiconductor Device Manufacturing Equipment
FC7100 Metal Gate Process PVD Equipment
IC7200 Interconnect PVD Equipment(φ200mm support)
NC7900 MRAM PVD Equipment (φ300mm support)
NC8000 MRAM Etching Equipment
IC7500 Memory Wire PVD Mass Production Equipment (φ300mm support)
EC7800 PVD Equipment for Semiconductor (φ300mm support)
EC8000 Dry Etching Equipment
Storage Device Manufacturing Equipment
ML3000 Series Disk PVD Equipment
HC7300 Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment
HC7100 Sputtering Equipment for Magnetic Heads
HC7400 Dry Etching Equipment for Magnetic Film
Equipment for Electronic Device Manufacturing and for R&D
BC7000 Atomic Diffusion Bonding Equipment
EB1100 PVD Equipment for R&D/Small-Scale Production
EC3000 Series PVD Equipment for LED Production
EC7400 PVD Equipment for Electronic Component Production
EL3200 Inline Type PVD Equipment for Electronic Component Production
EB1000 PVD Equipment for R&D
EC7000 Series PVD Equipment for Small-Scale Production
EC7200 SiC Electron Bombardment Anneal System (EBAS)
EC8100 LED PVD Equipment
EL3400 Advanced Packaging High Productivity PVD Equipment
Vacuum Components
Vacuum Pumps
Vacuum Gauges
Piping Parts·Ancillary Materials
Feed Throughs
X-ray Source
Quadrupole Mass Spectrometers
Leak Detectors
Valves
E-type Electron Gun
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Overhaul of Vacuum Equipments
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